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Grating manufacturing process: (a) MLD, BARC, and photoresist layers... | Download Scientific Diagram
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Color online) Improved uniformity of the resist coating of PFI-88/BARC... | Download Scientific Diagram
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PDF] Humidity Induced Defect Generation and Its Control during Organic Bottom Anti-reflective Coating in the Photo Lithography Process of Semiconductors | Semantic Scholar
Taking the wet-developable route to applying BARC in implant layers - Document - Gale Academic OneFile
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